Electronic
Grade HCl is used in the semiconductor industry for surface cleaning, metal-ion
removal, and pre-deposition wafer treatment.
Key
Details:
• Chemical Formula: HCl
• Molecular Weight: 36.46 g/mol
• CAS Number: 7647-01-0
• Appearance: Clear, colorless liquid
• Purity: ≥99.999% (5N–9N Electronic Grade)
• Boiling Point: ~110°C (at 20% solution)
Applications:
• Removal of metal ion contaminants from wafers
• RCA clean (HCl + H₂O₂ + H₂O) in semiconductor processing
• Pre-cleaning before oxidation, CVD, and epitaxy processes
Safety
Note: Strong acid, corrosive fumes; use fume hood and acid-resistant PPE.